Abstract
A technique for producing free-standing, single-crystal diamond microstructures from homoepitaxial films has been demonstrated. This simple preparation method for miniature parts makes diamond a reasonable alternative to the more common silicon-based micromechanical devices that have been produced over the past few years.
| Original language | English |
|---|---|
| Pages | 57-60 |
| Number of pages | 4 |
| Volume | 37 |
| No | 12 |
| Specialist publication | Solid State Technology |
| State | Published - Dec 1994 |