Interferometric measurements of graphene-based membranes for micromechanical applications

A. D. Ushakov; A. R. Akhmatkhanov; M. V. Chichkov; A. V. Turutin; M. A. Chuvakova; I. Kravchenko; V. Ya. Shur; A. L. Kholkin

doi:10.1080/00150193.2020.1722889

Interferometric measurements of graphene-based membranes for micromechanical applications

A. D. Ushakov, A. R. Akhmatkhanov, M. V. Chichkov, A. V. Turutin, M. A. Chuvakova, I. Kravchenko, V. Ya. Shur, A. L. Kholkin

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

Abstract

Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si₃N₄ membranes. The response in the center of square membrane of 6.7 × 6.7 mm² size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.

Original language	English
Pages (from-to)	95-101
Number of pages	7
Journal	Ferroelectrics
Volume	560
Issue number	1
DOIs	https://doi.org/10.1080/00150193.2020.1722889
State	Published - May 18 2020

Funding

The work was supported by the Russian Foundation for Basic Research (grant 16-29-14050-ofr-m) and Government of the Russian Federation (Act 211, Agreement 02.A03.21.0006). The equipment of the Ural Center for Shared Use “Modern Nanotechnology” Ural Federal University was used. A portion of this research was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility. A.V.T. was supported by the Russian Science Foundation, project no. 19-79-30062 in part of graphene samples preparation.

Funders	Funder number
Office of Science
Russian Foundation for Basic Research	16-29-14050-ofr-m
Russian Science Foundation	19-79-30062
Government Council on Grants, Russian Federation

Keywords

FEM
Piezoelectricity
graphene
interferometry
membrane
resonance

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10.1080/00150193.2020.1722889

Cite this

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title = "Interferometric measurements of graphene-based membranes for micromechanical applications",

abstract = "Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.",

keywords = "FEM, Piezoelectricity, graphene, interferometry, membrane, resonance",

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AU - Ushakov, A. D.

AU - Akhmatkhanov, A. R.

AU - Chichkov, M. V.

AU - Turutin, A. V.

AU - Chuvakova, M. A.

AU - Kravchenko, I.

AU - Ya. Shur, V.

AU - Kholkin, A. L.

PY - 2020/5/18

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N2 - Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.

AB - Recent studies on piezoelectricity in 2D materials, such as graphene, have revealed their potential in multiple applications including microelectromechanical systems. In this work, we reveal piezoelectricity in few-layer graphene sheets deposited on amorphous Si3N4 membranes. The response in the center of square membrane of 6.7 × 6.7 mm2 size reaches about 14 nm at resonance and could be further enhanced by adjusting the composite structure. Resonance piezoelectric phenomena are fully consistent with the earlier piezoresponse force microscopy observations on free-standing piezoelectric graphene and open up a possibility of using 2D materials in micromechanical applications.

KW - FEM

KW - Piezoelectricity

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Interferometric measurements of graphene-based membranes for micromechanical applications

Abstract

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Keywords

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