Interference pattern formation from an array of coherent laser beams

Y. Liu; J. Barhen; Y. Braiman; J. X. Zhong

doi:10.1116/1.1523396

Interference pattern formation from an array of coherent laser beams

Y. Liu, J. Barhen, Y. Braiman, J. X. Zhong

Beam Instrumentation

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

One- and two-dimensional patterns formed from the multiple-beam interference were studied. A simple Gaussian beam profile was assumed. The condition for achieving small feature size significantly smaller than λ/4 was analytically given and verified from numerical simulations. Dependence of the feature size on the beam number and the divergence angle was numerically studied. The resultant data were analyzed in detail.

Original language	English
Pages (from-to)	2602-2605
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	6
DOIs	https://doi.org/10.1116/1.1523396
State	Published - Nov 2002

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title = "Interference pattern formation from an array of coherent laser beams",

abstract = "One- and two-dimensional patterns formed from the multiple-beam interference were studied. A simple Gaussian beam profile was assumed. The condition for achieving small feature size significantly smaller than λ/4 was analytically given and verified from numerical simulations. Dependence of the feature size on the beam number and the divergence angle was numerically studied. The resultant data were analyzed in detail.",

author = "Y. Liu and J. Barhen and Y. Braiman and Zhong, {J. X.}",

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AU - Liu, Y.

AU - Barhen, J.

AU - Braiman, Y.

AU - Zhong, J. X.

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Y1 - 2002/11

N2 - One- and two-dimensional patterns formed from the multiple-beam interference were studied. A simple Gaussian beam profile was assumed. The condition for achieving small feature size significantly smaller than λ/4 was analytically given and verified from numerical simulations. Dependence of the feature size on the beam number and the divergence angle was numerically studied. The resultant data were analyzed in detail.

AB - One- and two-dimensional patterns formed from the multiple-beam interference were studied. A simple Gaussian beam profile was assumed. The condition for achieving small feature size significantly smaller than λ/4 was analytically given and verified from numerical simulations. Dependence of the feature size on the beam number and the divergence angle was numerically studied. The resultant data were analyzed in detail.

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U2 - 10.1116/1.1523396

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SN - 0734-211X

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EP - 2605

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -

Interference pattern formation from an array of coherent laser beams

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