Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

X. Yang, M. L. Simpson, S. J. Randolph, P. D. Rack, L. R. Baylor, H. Cui, W. L. Gardner

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

We report on the fabrication and operation of integrated field emission cathodes containing single tungsten (W) nanofibers selectively grown by nanoscale electron beam induced deposition (EBID). A nonorganometallic precursor, WF6, was used to deposit metallic W fibers. Vacuum electrical testing reveals electrons were successfully extracted from the W nanofiber tip and were collected by a phosphor anode. Direct current versus voltage (I-V) curves exhibited Fowler-Nordheim behavior, indicating the occurrence of cold field emission. Electrical testing of these devices indicated that EBID direct-write is a promising technique for direct production or repair of field emission cathodes.

Original languageEnglish
Article number183106
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume86
Issue number18
DOIs
StatePublished - May 2 2005

Funding

The authors acknowledge R. J. Kasica and D. K. Thomas for help with device fabrication. This research is sponsored by the Defense Advanced Research Projects Agency (DARPA) under Contract No. DARPA-MIPR-97-1357 with Oak Ridge National Laboratory (ORNL), by the Laboratory Directed Research and Development Program of ORNL, and by the Office of Basic Energy Sciences, Division of Materials Sciences, U.S. Department of Energy. The research is carried out at ORNL, managed by UT-Battelle, LLC, for the U.S. Department of Energy under Contract No. DE-AC05-00OR22725.

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