Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

X. Yang; M. L. Simpson; S. J. Randolph; P. D. Rack; L. R. Baylor; H. Cui; W. L. Gardner

doi:10.1063/1.1922568

Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

X. Yang, M. L. Simpson, S. J. Randolph, P. D. Rack, L. R. Baylor, H. Cui, W. L. Gardner

Fusion Energy Division

Research output: Contribution to journal › Article › peer-review

27 Scopus citations

Abstract

We report on the fabrication and operation of integrated field emission cathodes containing single tungsten (W) nanofibers selectively grown by nanoscale electron beam induced deposition (EBID). A nonorganometallic precursor, WF6, was used to deposit metallic W fibers. Vacuum electrical testing reveals electrons were successfully extracted from the W nanofiber tip and were collected by a phosphor anode. Direct current versus voltage (I-V) curves exhibited Fowler-Nordheim behavior, indicating the occurrence of cold field emission. Electrical testing of these devices indicated that EBID direct-write is a promising technique for direct production or repair of field emission cathodes.

Original language	English
Article number	183106
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	86
Issue number	18
DOIs	https://doi.org/10.1063/1.1922568
State	Published - May 2 2005

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title = "Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition",

abstract = "We report on the fabrication and operation of integrated field emission cathodes containing single tungsten (W) nanofibers selectively grown by nanoscale electron beam induced deposition (EBID). A nonorganometallic precursor, WF6, was used to deposit metallic W fibers. Vacuum electrical testing reveals electrons were successfully extracted from the W nanofiber tip and were collected by a phosphor anode. Direct current versus voltage (I-V) curves exhibited Fowler-Nordheim behavior, indicating the occurrence of cold field emission. Electrical testing of these devices indicated that EBID direct-write is a promising technique for direct production or repair of field emission cathodes.",

author = "X. Yang and Simpson, {M. L.} and Randolph, {S. J.} and Rack, {P. D.} and Baylor, {L. R.} and H. Cui and Gardner, {W. L.}",

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doi = "10.1063/1.1922568",

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T1 - Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

AU - Yang, X.

AU - Simpson, M. L.

AU - Randolph, S. J.

AU - Rack, P. D.

AU - Baylor, L. R.

AU - Cui, H.

AU - Gardner, W. L.

PY - 2005/5/2

Y1 - 2005/5/2

N2 - We report on the fabrication and operation of integrated field emission cathodes containing single tungsten (W) nanofibers selectively grown by nanoscale electron beam induced deposition (EBID). A nonorganometallic precursor, WF6, was used to deposit metallic W fibers. Vacuum electrical testing reveals electrons were successfully extracted from the W nanofiber tip and were collected by a phosphor anode. Direct current versus voltage (I-V) curves exhibited Fowler-Nordheim behavior, indicating the occurrence of cold field emission. Electrical testing of these devices indicated that EBID direct-write is a promising technique for direct production or repair of field emission cathodes.

AB - We report on the fabrication and operation of integrated field emission cathodes containing single tungsten (W) nanofibers selectively grown by nanoscale electron beam induced deposition (EBID). A nonorganometallic precursor, WF6, was used to deposit metallic W fibers. Vacuum electrical testing reveals electrons were successfully extracted from the W nanofiber tip and were collected by a phosphor anode. Direct current versus voltage (I-V) curves exhibited Fowler-Nordheim behavior, indicating the occurrence of cold field emission. Electrical testing of these devices indicated that EBID direct-write is a promising technique for direct production or repair of field emission cathodes.

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DO - 10.1063/1.1922568

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SN - 0003-6951

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SP - 1

EP - 3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 18

M1 - 183106

ER -

Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale electron beam-induced deposition

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