Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

M. A. Guillorn; M. D. Hale; V. I. Merkulov; M. L. Simpson; G. Y. Eres; H. Cui; A. A. Puretzky; D. B. Geohegan

doi:10.1116/1.1565343

Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

M. A. Guillorn, M. D. Hale, V. I. Merkulov, M. L. Simpson, G. Y. Eres, H. Cui, A. A. Puretzky, D. B. Geohegan

Research output: Contribution to journal › Article › peer-review

22 Scopus citations

Original language	English
Pages (from-to)	957-959
Number of pages	3
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	3
DOIs	https://doi.org/10.1116/1.1565343
State	Published - 2003

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Guillorn, M. A., Hale, M. D., Merkulov, V. I., Simpson, M. L., Eres, G. Y., Cui, H., Puretzky, A. A., & Geohegan, D. B. (2003). Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 21(3), 957-959. https://doi.org/10.1116/1.1565343

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AU - Eres, G. Y.

AU - Cui, H.

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Integrally gated carbon nanotube field emission cathodes produced by standard microfabrication techniques

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