Initial lithography results from the digital electrostatic e-beam array lithography concept

L. R. Baylor, W. L. Gardner, X. Yang, R. J. Kasica, M. A. Guillorn, B. Blalock, H. Cul, D. K. Hensley, S. Islam, D. H. Lowndes, A. V. Melechko, V. I. Merkulov, D. C. Joy, P. D. Rack, M. L. Simpson, D. K. Thomas

Research output: Contribution to journalArticlepeer-review

25 Scopus citations

Abstract

The Digital Electrostatically focused e-beam Array direct-write Lithography (DEAL) concept is currently under development at Oak Ridge National Laboratory (ORNL). This concept incorporates a digitally addressable field-emission array (DAFEA) built into a logic and control integrated circuit to function as the write head for an e-beam lithography tool. The electrostatic focusing is integrated on the DAFEA and consists of additional grids lithographically aligned above the emitters and extraction grid, each separated by a dielectric (nominally low-temperature SiO 2) layer. Prototypes of the DAFEA have been fabricated and used to test the focusing of the electron beams and to pattern lines in PMMA resist. First lithography tests have used electron energies of 500 eV to pattern lines less than 1 μm wide at a working distance of 500 μm which extrapolates to <300 nm at the nominal DEAL design working distance of 100 μm. Aspects of the DEAL lithography testing and further development are discussed.

Original languageEnglish
Pages (from-to)3021-3024
Number of pages4
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume22
Issue number6
DOIs
StatePublished - Nov 2004

Funding

This research was partially sponsored by the Defense Advanced Research Projects Agency (DARPA) under Contract No. DARPA-MIPR-97-1357 with Oak Ridge National Laboratory (ORNL), by the Laboratory Directed Research and Development Program of ORNL, and by the Office of Basic Energy Sciences, Division of Materials Sciences, U. S. Department of Energy. The research was carried out at ORNL, managed by UT-Battelle, LLC, for the U.S. Department of Energy under Contract No. DE-AC05-00OR22725.

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