Abstract
A micromechanical detector using microcantilever for infrared (IR) radiation is demonstrated. Because of their small size and low thermal mass, these microcantilever IR detectors are promising new family of IR sensors. This novel IR sensor is based on deflection due to IR adsorption induced thermal stress on a bimaterial cantilever which can be monitored with several methods such as optical deflection or piezoresistive. When laser-deflection-monitored Si^N^ microcantilevers coated with a 40nm thick coating of gold were irradiated by a low-power diode laser, the noise equivalent power and specific detectivity, NEP and D* were found to be 173pW/√Hz and 7.18 * 108cm √Hz/W, respectively, when compensation for the laser reflectivity was made.
| Original language | English |
|---|---|
| Title of host publication | Microelectromechanical Systems (MEMS) |
| Publisher | American Society of Mechanical Engineers (ASME) |
| Pages | 67-75 |
| Number of pages | 9 |
| ISBN (Electronic) | 9780791815410 |
| DOIs | |
| State | Published - 1996 |
| Externally published | Yes |
| Event | ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996 - Atlanta, United States Duration: Nov 17 1996 → Nov 22 1996 |
Publication series
| Name | ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE) |
|---|---|
| Volume | 1996-U |
Conference
| Conference | ASME 1996 International Mechanical Engineering Congress and Exposition, IMECE 1996 |
|---|---|
| Country/Territory | United States |
| City | Atlanta |
| Period | 11/17/96 → 11/22/96 |
Funding
Research sponsored by U.S. Department of Energy under contract DE-AC05-96OR22464 with Lockheed Martin Energy Research Corp. The authors wish to acknowledge the support of the ORNL Seed Money Program. The authors would like to thank Dr. Isidor Sauers for the use of his Miran 80 - Gas Infrared Analyzer. The efforts of P.I. Oden were supported, in part, by an appointment to the Alexander Hollaender Distinguished Postdoctoral Fellowship Program sponsored by the U.S. Department of Energy, Office of Health and Environmental Research, and administered by the Oak Ridge Institute for Science and Education. P.G. Datskos wishes to acknowledge the support of the National Science Foundation under the SBIR award DM2-9460929 to Consultec Scientific, Inc.