Abstract
A micromechanical detector using microcantilever for infrared (IR) radiation is demonstrated. Because of their small size and low thermal mass, these microcantilever IR detectors are promising new family of IR sensors. This novel IR sensor is based on deflection due to IR adsorption induced thermal stress on a bimaterial cantilever which can be monitored with several methods such as optical deflection or piezoresistive. When laser-deflection-monitored Si3N4 microcantilevers coated with a 40nm thick coating of gold were irradiated by a low-power diode laser, the noise equivalent power and specific detectivity, NEP and D* were found to be 173pW/√Hz and 7.18×108 cm√Hz/W, respectively, when compensation for the laser reflectivity was made.
Original language | English |
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Pages (from-to) | 67-75 |
Number of pages | 9 |
Journal | American Society of Mechanical Engineers, Dynamic Systems and Control Division (Publication) DSC |
Volume | 59 |
State | Published - 1996 |
Externally published | Yes |