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Influence of the film properties on the plasma etching dynamics of rf-sputtered indium zinc oxide layers
L. Stafford, W. T. Lim, S. J. Pearton, M. Chicoine, S. Gujrathi, F. Schiettekatte, Jae Soung Park, Ju Il Song, Young Woo Heo, Joon Hyung Lee, Jeong Joo Kim, I. I. Kravchenko
Research output: Contribution to journal › Article › peer-review
10
Scopus
citations