Influence of grating parameters on reflectivity of Si/SiO2 high contrast gratings

  • Xiu Shan Li
  • , Yong Qiang Ning
  • , Xing Zhang
  • , Peng Jia
  • , Yong Yi Chen
  • , Li Qin
  • , Yun Liu
  • , Li Jun Wang

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

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