In situ X-ray studies of vapor phase epitaxy of PbTiO3

G. B. Stephenson; D. D. Fong; M. V. Ramana Murty; S. K. Streiffer; J. A. Eastman; O. Auciello; P. H. Fuoss; A. Munkholm; M. E.M. Aanerud; Carol Thompson

doi:10.1016/S0921-4526(03)00273-4

In situ X-ray studies of vapor phase epitaxy of PbTiO₃

G. B. Stephenson, D. D. Fong, M. V. Ramana Murty, S. K. Streiffer, J. A. Eastman, O. Auciello, P. H. Fuoss, A. Munkholm, M. E.M. Aanerud, Carol Thompson

Research output: Contribution to journal › Conference article › peer-review

22 Scopus citations

Abstract

As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO₃ films during and following growth. Moderately high energy (24keV) X-rays are used to penetrate the chamber walls for in situ measurements in the high-temperature, reactive MOVPE environment. Performing measurements in situ allows us to study the growth process in real time, to control the thickness of the films to sub-unit-cell accuracy, to observe the surface structure in equilibrium with the vapor, and to preserve film stoichiometry during high-temperature study by maintaining an overpressure of PbO. While the higher X-ray energy also permits a large volume of reciprocal space to be mapped, it presents challenges for surface scattering due to the small critical angle. Examples of results will be presented from studies of surface structure dynamics, crystal growth, and ferroelectric stripe domains in thin films.

Original language	English
Pages (from-to)	81-89
Number of pages	9
Journal	Physica B: Physics of Condensed Matter
Volume	336
Issue number	1-2
DOIs	https://doi.org/10.1016/S0921-4526(03)00273-4
State	Published - Aug 2003
Externally published	Yes
Event	Proceedings of the 7th SXNS - Lake Tahoe, CA, United States Duration: Sep 23 2002 → Sep 27 2002

Funding

We would like to acknowledge the consistently dedicated effort of the BESSRC beamline staff during the course of these experiments, and the capable assistance of G.-R. Bai and L. Thompson. This work is supported by the US Department of Energy under contract W-31-109-ENG-38, and the State of Illinois under HECA.

Funders	Funder number
US Department of Energy	W-31-109-ENG-38

Keywords

Ferroelectrics
Grazing incidence X-ray scattering
In situ
Metal organic vapor phase epitaxy

Access to Document

10.1016/S0921-4526(03)00273-4

Cite this

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title = "In situ X-ray studies of vapor phase epitaxy of PbTiO3",

abstract = "As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO3 films during and following growth. Moderately high energy (24keV) X-rays are used to penetrate the chamber walls for in situ measurements in the high-temperature, reactive MOVPE environment. Performing measurements in situ allows us to study the growth process in real time, to control the thickness of the films to sub-unit-cell accuracy, to observe the surface structure in equilibrium with the vapor, and to preserve film stoichiometry during high-temperature study by maintaining an overpressure of PbO. While the higher X-ray energy also permits a large volume of reciprocal space to be mapped, it presents challenges for surface scattering due to the small critical angle. Examples of results will be presented from studies of surface structure dynamics, crystal growth, and ferroelectric stripe domains in thin films.",

keywords = "Ferroelectrics, Grazing incidence X-ray scattering, In situ, Metal organic vapor phase epitaxy",

author = "Stephenson, {G. B.} and Fong, {D. D.} and {Ramana Murty}, {M. V.} and Streiffer, {S. K.} and Eastman, {J. A.} and O. Auciello and Fuoss, {P. H.} and A. Munkholm and Aanerud, {M. E.M.} and Carol Thompson",

year = "2003",

month = aug,

doi = "10.1016/S0921-4526(03)00273-4",

language = "English",

volume = "336",

pages = "81--89",

journal = "Physica B: Physics of Condensed Matter",

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note = "Proceedings of the 7th SXNS ; Conference date: 23-09-2002 Through 27-09-2002",

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T1 - In situ X-ray studies of vapor phase epitaxy of PbTiO3

AU - Stephenson, G. B.

AU - Fong, D. D.

AU - Ramana Murty, M. V.

AU - Streiffer, S. K.

AU - Eastman, J. A.

AU - Auciello, O.

AU - Fuoss, P. H.

AU - Munkholm, A.

AU - Aanerud, M. E.M.

AU - Thompson, Carol

PY - 2003/8

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N2 - As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO3 films during and following growth. Moderately high energy (24keV) X-rays are used to penetrate the chamber walls for in situ measurements in the high-temperature, reactive MOVPE environment. Performing measurements in situ allows us to study the growth process in real time, to control the thickness of the films to sub-unit-cell accuracy, to observe the surface structure in equilibrium with the vapor, and to preserve film stoichiometry during high-temperature study by maintaining an overpressure of PbO. While the higher X-ray energy also permits a large volume of reciprocal space to be mapped, it presents challenges for surface scattering due to the small critical angle. Examples of results will be presented from studies of surface structure dynamics, crystal growth, and ferroelectric stripe domains in thin films.

AB - As part of a program to understand and control the structure of ferroelectric thin films grown by metal organic vapor phase epitaxy (MOVPE), we have used X-ray scattering to observe the surface structure of PbTiO3 films during and following growth. Moderately high energy (24keV) X-rays are used to penetrate the chamber walls for in situ measurements in the high-temperature, reactive MOVPE environment. Performing measurements in situ allows us to study the growth process in real time, to control the thickness of the films to sub-unit-cell accuracy, to observe the surface structure in equilibrium with the vapor, and to preserve film stoichiometry during high-temperature study by maintaining an overpressure of PbO. While the higher X-ray energy also permits a large volume of reciprocal space to be mapped, it presents challenges for surface scattering due to the small critical angle. Examples of results will be presented from studies of surface structure dynamics, crystal growth, and ferroelectric stripe domains in thin films.

KW - Ferroelectrics

KW - Grazing incidence X-ray scattering

KW - In situ

KW - Metal organic vapor phase epitaxy

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