In situ x-ray scattering study of PbTiO3 chemical-vapor deposition

M. V.Ramana Murty; S. K. Streiffer; G. B. Stephenson; J. A. Eastman; G. R. Bai; A. Munkholm; O. Auciello; Carol Thompson

doi:10.1063/1.1458530

In situ x-ray scattering study of PbTiO₃ chemical-vapor deposition

M. V.Ramana Murty, S. K. Streiffer, G. B. Stephenson, J. A. Eastman, G. R. Bai, A. Munkholm, O. Auciello, Carol Thompson

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35 Scopus citations

Abstract

We present in situ surface x-ray scattering measurements of PbTiO ₃ epitaxy by metal-organic chemical-vapor deposition. Oscillations in crystal truncation rod intensity corresponding to layer-by-layer growth are observed under a variety of growth conditions. At lower PbO overpressures, we observe a transition to step-flow growth and an increased rate of recovery after growth, indicating a higher surface mobility.

Original language	English
Pages (from-to)	1809-1811
Number of pages	3
Journal	Applied Physics Letters
Volume	80
Issue number	10
DOIs	https://doi.org/10.1063/1.1458530
State	Published - Mar 11 2002
Externally published	Yes

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title = "In situ x-ray scattering study of PbTiO3 chemical-vapor deposition",

abstract = "We present in situ surface x-ray scattering measurements of PbTiO 3 epitaxy by metal-organic chemical-vapor deposition. Oscillations in crystal truncation rod intensity corresponding to layer-by-layer growth are observed under a variety of growth conditions. At lower PbO overpressures, we observe a transition to step-flow growth and an increased rate of recovery after growth, indicating a higher surface mobility.",

author = "Murty, \{M. V.Ramana\} and Streiffer, \{S. K.\} and Stephenson, \{G. B.\} and Eastman, \{J. A.\} and Bai, \{G. R.\} and A. Munkholm and O. Auciello and Carol Thompson",

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volume = "80",

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journal = "Applied Physics Letters",

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T1 - In situ x-ray scattering study of PbTiO3 chemical-vapor deposition

AU - Murty, M. V.Ramana

AU - Streiffer, S. K.

AU - Stephenson, G. B.

AU - Eastman, J. A.

AU - Bai, G. R.

AU - Munkholm, A.

AU - Auciello, O.

AU - Thompson, Carol

PY - 2002/3/11

Y1 - 2002/3/11

N2 - We present in situ surface x-ray scattering measurements of PbTiO 3 epitaxy by metal-organic chemical-vapor deposition. Oscillations in crystal truncation rod intensity corresponding to layer-by-layer growth are observed under a variety of growth conditions. At lower PbO overpressures, we observe a transition to step-flow growth and an increased rate of recovery after growth, indicating a higher surface mobility.

AB - We present in situ surface x-ray scattering measurements of PbTiO 3 epitaxy by metal-organic chemical-vapor deposition. Oscillations in crystal truncation rod intensity corresponding to layer-by-layer growth are observed under a variety of growth conditions. At lower PbO overpressures, we observe a transition to step-flow growth and an increased rate of recovery after growth, indicating a higher surface mobility.

UR - https://www.scopus.com/pages/publications/79956035408

U2 - 10.1063/1.1458530

DO - 10.1063/1.1458530

M3 - Article

AN - SCOPUS:79956035408

SN - 0003-6951

VL - 80

SP - 1809

EP - 1811

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 10

ER -

In situ x-ray scattering study of PbTiO₃ chemical-vapor deposition

Abstract

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