In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation

Giovanni Esteves; Chris M. Fancher; Margeaux Wallace; Raegan Johnson-Wilke; Rudeger H.T. Wilke; Susan Trolier-McKinstry; Ronald G. Polcawich; Jacob L. Jones

doi:10.1016/j.matdes.2016.09.011

In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation

Giovanni Esteves, Chris M. Fancher, Margeaux Wallace, Raegan Johnson-Wilke, Rudeger H.T. Wilke, Susan Trolier-McKinstry, Ronald G. Polcawich, Jacob L. Jones

Research output: Contribution to journal › Article › peer-review

8 Scopus citations

Abstract

Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO₂ and Si₃N₄. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm³) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

Original language	English
Pages (from-to)	429-434
Number of pages	6
Journal	Materials and Design
Volume	111
DOIs	https://doi.org/10.1016/j.matdes.2016.09.011
State	Published - Dec 5 2016
Externally published	Yes

Funding

The authors gratefully acknowledge support of this research from the U.S. National Science Foundation ( DMR-1410907 and DMR-1409399 ). The authors acknowledge the use of the Analytical Instrumentation Facility (AIF) at North Carolina State University, which is supported by the State of North Carolina and the National Science Foundation. The authors would like to thank Mr. Jeffrey S. Pulskamp for his design of the microflight actuators and Ms. Mary G. Koebke for fabricating the PCB used for electrical testing. This research used resources of the Advanced Photon Source, a U.S. Department of Energy (DOE) Office of Science User Facility operated for the DOE Office of Science by Argonne National Laboratory under Contract No. DE-AC02-06CH11357.

Funders	Funder number
National Science Foundation	DMR-1409399, DMR-1410907, 1410907, 1409399
U.S. Department of Energy
Office of Science
Argonne National Laboratory	DE-AC02-06CH11357
North Carolina State University

Keywords

Ferroelectrics
PZT
PiezoMEMS
Thin film
X-ray diffraction

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title = "In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation",

abstract = "Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.",

keywords = "Ferroelectrics, PZT, PiezoMEMS, Thin film, X-ray diffraction",

author = "Giovanni Esteves and Fancher, {Chris M.} and Margeaux Wallace and Raegan Johnson-Wilke and Wilke, {Rudeger H.T.} and Susan Trolier-McKinstry and Polcawich, {Ronald G.} and Jones, {Jacob L.}",

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AU - Esteves, Giovanni

AU - Fancher, Chris M.

AU - Wallace, Margeaux

AU - Johnson-Wilke, Raegan

AU - Wilke, Rudeger H.T.

AU - Trolier-McKinstry, Susan

AU - Polcawich, Ronald G.

AU - Jones, Jacob L.

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N2 - Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

AB - Synchrotron X-ray diffraction (XRD) was used to probe the electric-field-induced response of a 500 nm lead zirconate titanate (52/48, Zr/Ti) (PZT) based piezoelectric microelectromechanical system (piezoMEMS) device. 90° ferroelectric/ferroelastic domain reorientation was observed in a cantilever comprised of a 500 nm thick PZT film on a 3 μm thick elastic layer composite of SiO2 and Si3N4. Diffraction data from sectors both parallel- and perpendicular-to-field showed the presence of ferroelastic texture, which is typically seen in in situ electric field diffraction studies of bulk tetragonal perovskite ferroelectrics. The fraction of domains reoriented into the field direction was quantified through the intensity changes of the 002 and 200 diffraction profiles. The maximum induced volume fraction calculated from the results was 20%, which is comparable to values seen in previous bulk and thin film ferroelectric diffraction studies. The novelty of the present work is that a fully released ferroelectric thin film device of micron scale dimensions (down to 60,000 μm3) was interrogated in situ with an applied electric field using synchrotron XRD. Furthermore, the experiment demonstrates that 90° ferroelectric/ferroelastic domain reorientation can be characterized in samples of such small dimensions.

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In situ X-ray diffraction of lead zirconate titanate piezoMEMS cantilever during actuation

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