Improved Carbonization Process of Nano-Electrodes for Biosensor Systems

Andalib Nizam, Nickolay V. Lavrik, Dale Hensley, Nicole McFarlane

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

This paper presents an improved process of partial to full carbonization of polymer nanoelectrode structures through thermal pyrolysis. A pillar and bridge structure of electrode array were developed using 3D laser writing based on 2-photon polymerization. Silicon, quartz, and glass ITO have been used as substrates. The two-step annealing duration time was varied from 10 hours to 30 minutes to achieve carbonized polymer structures by increasing input laser power of the 3D printing step. Two photoresist variants were used to build robust structures that can withstand the high temperature anneal. Carbonization of the structures were experimentally verified with Raman spectroscopy. Additionally, a biosensor system prototype was built by placing live biological cells on top of the carbonized nanoelectrodes and cell impedance measurement was conducted.

Original languageEnglish
Title of host publication2023 IEEE BioSensors Conference, BioSensors 2023 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9798350346046
DOIs
StatePublished - 2023
Event1st Annual IEEE BioSensors Conference, BioSensors 2023 - London, United Kingdom
Duration: Jul 30 2023Aug 1 2023

Publication series

Name2023 IEEE BioSensors Conference, BioSensors 2023 - Proceedings

Conference

Conference1st Annual IEEE BioSensors Conference, BioSensors 2023
Country/TerritoryUnited Kingdom
CityLondon
Period07/30/2308/1/23

Keywords

  • Annealing
  • Bioluminescence
  • Biosensors
  • Conductivity
  • Electric potential
  • Electrodes
  • Impedance
  • Metals
  • Polymers
  • Pyrolysis
  • Raman scattering
  • Scanning electron microscopy

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