Hydrothermal degradation of bis-silane films

  • Peng Wang
  • , Dale W. Schaefer
  • , Yimin Wang
  • , Guirong Pan
  • , Michael S. Kent
  • , Hyun Yim
  • , Erik Watkins
  • , Jaroslaw Majewski

Research output: Contribution to conferencePaperpeer-review

Original languageEnglish
Pages4429-4434
Number of pages6
StatePublished - 2005
Externally publishedYes
Event05AIChE: 2005 AIChE Annual Meeting and Fall Showcase - Cincinnati, OH, United States
Duration: Oct 30 2005Nov 4 2005

Conference

Conference05AIChE: 2005 AIChE Annual Meeting and Fall Showcase
Country/TerritoryUnited States
CityCincinnati, OH
Period10/30/0511/4/05

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