Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

Yong Zhang; Wen Wang; Haitao Ren; Wenjia Han; Fangshu Liu; Jiangang Yu; Shixiang Peng; Kaigui Zhu

doi:10.1016/j.nimb.2013.04.026

Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

Yong Zhang, Wen Wang, Haitao Ren, Wenjia Han, Fangshu Liu, Jiangang Yu, Shixiang Peng, Kaigui Zhu

Research output: Contribution to journal › Article › peer-review

4 Scopus citations

Abstract

W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.

Original language	English
Pages (from-to)	357-361
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	307
DOIs	https://doi.org/10.1016/j.nimb.2013.04.026
State	Published - 2013
Externally published	Yes

Funding

This research is supported by the National Magnetic Confinement Fusion Program (Grant No. 2011GB108008 ), National Natural Science Foundation of China (NSFC) Grant No. 51171006 .

Keywords

Hydrogen plasma irradiation
Magnetron sputtering deposition
SEM
W thin films

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10.1016/j.nimb.2013.04.026

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title = "Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition",

abstract = "W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.",

keywords = "Hydrogen plasma irradiation, Magnetron sputtering deposition, SEM, W thin films",

author = "Yong Zhang and Wen Wang and Haitao Ren and Wenjia Han and Fangshu Liu and Jiangang Yu and Shixiang Peng and Kaigui Zhu",

year = "2013",

doi = "10.1016/j.nimb.2013.04.026",

language = "English",

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journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

AU - Zhang, Yong

AU - Wang, Wen

AU - Ren, Haitao

AU - Han, Wenjia

AU - Liu, Fangshu

AU - Yu, Jiangang

AU - Peng, Shixiang

AU - Zhu, Kaigui

PY - 2013

Y1 - 2013

N2 - W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.

AB - W is regarded as one of the most promising candidate materials for plasma-facing materials in future fusion reactors. For this reason, W is studied in variety of formats, such as W blocks, W alloys, W films. In this work, W thin films were prepared by magnetron sputtering deposition. Different materials were used as the substrates. Hydrogen plasma irradiation effect of the thin films was investigated.

KW - Hydrogen plasma irradiation

KW - Magnetron sputtering deposition

KW - SEM

KW - W thin films

UR - https://www.scopus.com/pages/publications/84885175833

U2 - 10.1016/j.nimb.2013.04.026

DO - 10.1016/j.nimb.2013.04.026

M3 - Article

AN - SCOPUS:84885175833

SN - 0168-583X

VL - 307

SP - 357

EP - 361

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ER -

Hydrogen irradiation effect of W thin films prepared by magnetron sputtering deposition

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