Hole count and secondary excitation in several analytical electron microscopes

E. A. Kenik, L. F. Allard, J. Bentley

Research output: Contribution to journalConference articlepeer-review

1 Scopus citations

Abstract

The article presents a study on the hole count and secondary excitation in analytical electron microscope. Hole count spectra was measured in several AEMs and compared to those produced by direct excitation of molybdenum support by the high energy electrons at reduced beam current. It was observed that electrons are the primary source of hole count in this case. It was supported by the presence of a small chromium Kα peak in the hole count spectrum. High energy x-rays interaction with thick chromium film should produce negligible chromium x rays. These results were also obtained from other AEMs.

Original languageEnglish
Pages (from-to)592-593
Number of pages2
JournalProceedings - Annual Meeting, Microscopy Society of America
StatePublished - 1993
EventProceedings of the 51st Annual Meeting Microscopy Society of America - Cincinnati, OH, USA
Duration: Aug 1 1993Aug 6 1993

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