Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser

F. Pedaci; Y. Wang; M. Berrill; B. Luther; E. Granados; J. J. Rocca

doi:10.1364/OL.33.000491

Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser

F. Pedaci
, Y. Wang
, M. Berrill
, B. Luther
, E. Granados
, J. J. Rocca

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

Original language	English
Pages (from-to)	491-493
Number of pages	3
Journal	Optics Letters
Volume	33
Issue number	5
DOIs	https://doi.org/10.1364/OL.33.000491
State	Published - Mar 1 2008
Externally published	Yes

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10.1364/OL.33.000491

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title = "Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser",

abstract = "We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.",

author = "F. Pedaci and Y. Wang and M. Berrill and B. Luther and E. Granados and Rocca, \{J. J.\}",

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AU - Pedaci, F.

AU - Wang, Y.

AU - Berrill, M.

AU - Luther, B.

AU - Granados, E.

AU - Rocca, J. J.

PY - 2008/3/1

Y1 - 2008/3/1

N2 - We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

AB - We report a dramatic improvement of the spatial coherence and beam divergence (0.66 mrad) of a 13.2 nm wavelength Ni-like Cd tabletop laser by injection seeding the soft x-ray laser amplifier with high-harmonics pulses generated in a Ne gas jet. This phase coherent laser is an attractive light source for at-wavelength interferometry of extreme ultraviolet lithography optics and other applications.

UR - https://www.scopus.com/pages/publications/41149138810

U2 - 10.1364/OL.33.000491

DO - 10.1364/OL.33.000491

M3 - Article

AN - SCOPUS:41149138810

SN - 0146-9592

VL - 33

SP - 491

EP - 493

JO - Optics Letters

JF - Optics Letters

IS - 5

ER -

Highly coherent injection-seeded 13.2 nm tabletop soft x-ray laser

Abstract

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