High resolution optical recording on a-Si films

V. Z. Gotchiyaev; V. P. Korolkov; A. P. Sokolov; V. P. Chernukhin

doi:10.1016/S0022-3093(05)80361-8

High resolution optical recording on a-Si films

V. Z. Gotchiyaev
, V. P. Korolkov
, A. P. Sokolov
, V. P. Chernukhin

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The changes in optical properties and structure of a-Si films under laser annealing and spatial resolution of optical recording has been studied. The mechanism of the observed changes is discussed. The spatial resolution of up to 2000 lines/mm has been obtained. The difference of solubility for irradiated and nonirradiated regions of the samples has been observed. It is shown that the optical recording on a-Si films is promising for producing of half-tone photomasks of kinofom optical elements.

Original language	English
Pages (from-to)	1297-1300
Number of pages	4
Journal	Journal of Non-Crystalline Solids
Volume	137-138
Issue number	PART 2
DOIs	https://doi.org/10.1016/S0022-3093(05)80361-8
State	Published - 1991
Externally published	Yes

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10.1016/S0022-3093(05)80361-8

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title = "High resolution optical recording on a-Si films",

abstract = "The changes in optical properties and structure of a-Si films under laser annealing and spatial resolution of optical recording has been studied. The mechanism of the observed changes is discussed. The spatial resolution of up to 2000 lines/mm has been obtained. The difference of solubility for irradiated and nonirradiated regions of the samples has been observed. It is shown that the optical recording on a-Si films is promising for producing of half-tone photomasks of kinofom optical elements.",

author = "Gotchiyaev, \{V. Z.\} and Korolkov, \{V. P.\} and Sokolov, \{A. P.\} and Chernukhin, \{V. P.\}",

year = "1991",

doi = "10.1016/S0022-3093(05)80361-8",

language = "English",

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pages = "1297--1300",

journal = "Journal of Non-Crystalline Solids",

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T1 - High resolution optical recording on a-Si films

AU - Gotchiyaev, V. Z.

AU - Korolkov, V. P.

AU - Sokolov, A. P.

AU - Chernukhin, V. P.

PY - 1991

Y1 - 1991

N2 - The changes in optical properties and structure of a-Si films under laser annealing and spatial resolution of optical recording has been studied. The mechanism of the observed changes is discussed. The spatial resolution of up to 2000 lines/mm has been obtained. The difference of solubility for irradiated and nonirradiated regions of the samples has been observed. It is shown that the optical recording on a-Si films is promising for producing of half-tone photomasks of kinofom optical elements.

AB - The changes in optical properties and structure of a-Si films under laser annealing and spatial resolution of optical recording has been studied. The mechanism of the observed changes is discussed. The spatial resolution of up to 2000 lines/mm has been obtained. The difference of solubility for irradiated and nonirradiated regions of the samples has been observed. It is shown that the optical recording on a-Si films is promising for producing of half-tone photomasks of kinofom optical elements.

UR - https://www.scopus.com/pages/publications/0010270644

U2 - 10.1016/S0022-3093(05)80361-8

DO - 10.1016/S0022-3093(05)80361-8

M3 - Article

AN - SCOPUS:0010270644

SN - 0022-3093

VL - 137-138

SP - 1297

EP - 1300

JO - Journal of Non-Crystalline Solids

JF - Journal of Non-Crystalline Solids

IS - PART 2

ER -

High resolution optical recording on a-Si films

Abstract

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