High-pressure phase transformation of silicon nitride

John Patten; Ronnie Fesperman; Satya Kumar; Sam McSpadden; Jun Qu; Michael Lance; Robert Nemanich; Jennifer Huening

doi:10.1063/1.1632031

High-pressure phase transformation of silicon nitride

John Patten
, Ronnie Fesperman
, Satya Kumar
, Sam McSpadden
, Jun Qu
, Michael Lance
, Robert Nemanich
, Jennifer Huening

Research output: Contribution to journal › Article › peer-review

28 Scopus citations

Abstract

A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.

Original language	English
Pages (from-to)	4740-4742
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	23
DOIs	https://doi.org/10.1063/1.1632031
State	Published - Dec 8 2003

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10.1063/1.1632031

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@article{c5f65cf475684cf89a0db5a9d08a9ca4,

title = "High-pressure phase transformation of silicon nitride",

abstract = "A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.",

author = "John Patten and Ronnie Fesperman and Satya Kumar and Sam McSpadden and Jun Qu and Michael Lance and Robert Nemanich and Jennifer Huening",

year = "2003",

month = dec,

day = "8",

doi = "10.1063/1.1632031",

language = "English",

volume = "83",

pages = "4740--4742",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "23",

}

TY - JOUR

T1 - High-pressure phase transformation of silicon nitride

AU - Patten, John

AU - Fesperman, Ronnie

AU - Kumar, Satya

AU - McSpadden, Sam

AU - Qu, Jun

AU - Lance, Michael

AU - Nemanich, Robert

AU - Huening, Jennifer

PY - 2003/12/8

Y1 - 2003/12/8

N2 - A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.

AB - A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.

UR - https://www.scopus.com/pages/publications/0346936434

U2 - 10.1063/1.1632031

DO - 10.1063/1.1632031

M3 - Article

AN - SCOPUS:0346936434

SN - 0003-6951

VL - 83

SP - 4740

EP - 4742

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -

High-pressure phase transformation of silicon nitride

Abstract

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