Abstract
A high-pressure phase transformation (HPPT) in the ceramic material silicon nitride (SiN) was analyzed. The structure of the micro-and macromachined SiN was analyzed using a high-pressure diamond anvil cell, Raman spectroscopy, csanning/transmission electron microscopy, optical and acoustic microscope inspection. The HPPT exhibited a ductile or metallike behavior leading to severe plastic deformation. The results show that the pressure-induced plasticity was similar to that found in Si and germanium.
Original language | English |
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Pages (from-to) | 4740-4742 |
Number of pages | 3 |
Journal | Applied Physics Letters |
Volume | 83 |
Issue number | 23 |
DOIs | |
State | Published - Dec 8 2003 |