High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.