High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

Zhenfu Wang; Yongqiang Ning; Yan Zhang; Jingjing Shi; Xing Zhang; Lisen Zhang; Wei Wang; Di Liu; Yongsheng Hu; Haibing Cong; Li Qin; Yun Liu; Lijun Wang

doi:10.1364/OE.18.023900

High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

Zhenfu Wang, Yongqiang Ning, Yan Zhang, Jingjing Shi, Xing Zhang, Lisen Zhang, Wei Wang, Di Liu, Yongsheng Hu, Haibing Cong, Li Qin, Yun Liu, Lijun Wang

Research output: Contribution to journal › Article › peer-review

34 Scopus citations

Abstract

High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

Original language	English
Pages (from-to)	23900-23905
Number of pages	6
Journal	Optics Express
Volume	18
Issue number	23
DOIs	https://doi.org/10.1364/OE.18.023900
State	Published - Nov 8 2010

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title = "High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array",

abstract = "High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.",

author = "Zhenfu Wang and Yongqiang Ning and Yan Zhang and Jingjing Shi and Xing Zhang and Lisen Zhang and Wei Wang and Di Liu and Yongsheng Hu and Haibing Cong and Li Qin and Yun Liu and Lijun Wang",

year = "2010",

month = nov,

day = "8",

doi = "10.1364/OE.18.023900",

language = "English",

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TY - JOUR

T1 - High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

AU - Wang, Zhenfu

AU - Ning, Yongqiang

AU - Zhang, Yan

AU - Shi, Jingjing

AU - Zhang, Xing

AU - Zhang, Lisen

AU - Wang, Wei

AU - Liu, Di

AU - Hu, Yongsheng

AU - Cong, Haibing

AU - Qin, Li

AU - Liu, Yun

AU - Wang, Lijun

PY - 2010/11/8

Y1 - 2010/11/8

N2 - High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

AB - High power and good beam quality of two-dimensional bottom-emitting vertical-cavity surface-emitting laser array with GaAs microlens on the substrate is achieved. Uniform and matched convex microlens is directly fabricated by one-step diffusion-limited wet-etching techniques on the emitting windows. The maximum output power is above 1W at continuous-wave operation at room temperature, and the far-field beam divergence is below 6.6°at a current of 4A. These properties between microlens-integrated and conventional device at different operating current are demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=78149447121&partnerID=8YFLogxK

U2 - 10.1364/OE.18.023900

DO - 10.1364/OE.18.023900

M3 - Article

AN - SCOPUS:78149447121

SN - 1094-4087

VL - 18

SP - 23900

EP - 23905

JO - Optics Express

JF - Optics Express

IS - 23

ER -

High power and good beam quality of two-dimensional VCSEL array with integrated GaAs microlens array

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