High power 121.6 nm radiation source

Research output: Contribution to journal › Article › peer-review

3 Scopus citations

Original language	English
Pages (from-to)	2839-2842
Number of pages	4
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1627801
State	Published - 2003
Externally published	Yes

Access to Document

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title = "High power 121.6 nm radiation source",

author = "Jianxun Yan and Gupta, {Mool C.}",

year = "2003",

doi = "10.1116/1.1627801",

language = "English",

volume = "21",

pages = "2839--2842",

journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

number = "6",

}

TY - JOUR

T1 - High power 121.6 nm radiation source

AU - Yan, Jianxun

AU - Gupta, Mool C.

PY - 2003

Y1 - 2003

UR - http://www.scopus.com/inward/record.url?scp=0942278336&partnerID=8YFLogxK

U2 - 10.1116/1.1627801

DO - 10.1116/1.1627801

M3 - Article

AN - SCOPUS:0942278336

SN - 1071-1023

VL - 21

SP - 2839

EP - 2842

JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

ER -