Helium-ion microscopy and its applications in nanoscale devices

Shinichi Ogawa; Gregor Hlawacek; Fayong Liu; Shu Nakaharai; Nirjhar Sarkar; Shane Cybartie

Helium-ion microscopy and its applications in nanoscale devices

Shinichi Ogawa
, Gregor Hlawacek
, Fayong Liu
, Shu Nakaharai
, Nirjhar Sarkar
, Shane Cybartie

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Original language	English
Title of host publication	Outlooking beyond Nanoelectronics and Nanosystems
Subtitle of host publication	Ultra Scaling, Pervasiveness, Sustainable Integration, and Biotic Cross-Inspiration
Publisher	Jenny Stanford Publishing
Pages	139-213
Number of pages	75
ISBN (Electronic)	9781040113110
ISBN (Print)	9789815129328
State	Published - Aug 9 2024
Externally published	Yes

Cite this

@inbook{4996a548666a46859b88e75bf3d3aa47,

title = "Helium-ion microscopy and its applications in nanoscale devices",

author = "Shinichi Ogawa and Gregor Hlawacek and Fayong Liu and Shu Nakaharai and Nirjhar Sarkar and Shane Cybartie",

year = "2024",

month = aug,

day = "9",

language = "English",

isbn = "9789815129328",

pages = "139--213",

booktitle = "Outlooking beyond Nanoelectronics and Nanosystems",

publisher = "Jenny Stanford Publishing",

}

Helium-ion microscopy and its applications in nanoscale devices. / Ogawa, Shinichi; Hlawacek, Gregor; Liu, Fayong et al.
Outlooking beyond Nanoelectronics and Nanosystems: Ultra Scaling, Pervasiveness, Sustainable Integration, and Biotic Cross-Inspiration. Jenny Stanford Publishing, 2024. p. 139-213.

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

TY - CHAP

T1 - Helium-ion microscopy and its applications in nanoscale devices

AU - Ogawa, Shinichi

AU - Hlawacek, Gregor

AU - Liu, Fayong

AU - Nakaharai, Shu

AU - Sarkar, Nirjhar

AU - Cybartie, Shane

PY - 2024/8/9

Y1 - 2024/8/9

UR - https://www.scopus.com/pages/publications/85198932973

M3 - Chapter

AN - SCOPUS:85198932973

SN - 9789815129328

SP - 139

EP - 213

BT - Outlooking beyond Nanoelectronics and Nanosystems

PB - Jenny Stanford Publishing

ER -

Helium-ion microscopy and its applications in nanoscale devices

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Cite this