Helium-ion microscopy and its applications in nanoscale devices

  • Shinichi Ogawa
  • , Gregor Hlawacek
  • , Fayong Liu
  • , Shu Nakaharai
  • , Nirjhar Sarkar
  • , Shane Cybartie

Research output: Chapter in Book/Report/Conference proceedingChapterpeer-review

Original languageEnglish
Title of host publicationOutlooking beyond Nanoelectronics and Nanosystems
Subtitle of host publicationUltra Scaling, Pervasiveness, Sustainable Integration, and Biotic Cross-Inspiration
PublisherJenny Stanford Publishing
Pages139-213
Number of pages75
ISBN (Electronic)9781040113110
ISBN (Print)9789815129328
StatePublished - Aug 9 2024
Externally publishedYes

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