| Original language | English |
|---|---|
| Title of host publication | Outlooking beyond Nanoelectronics and Nanosystems |
| Subtitle of host publication | Ultra Scaling, Pervasiveness, Sustainable Integration, and Biotic Cross-Inspiration |
| Publisher | Jenny Stanford Publishing |
| Pages | 139-213 |
| Number of pages | 75 |
| ISBN (Electronic) | 9781040113110 |
| ISBN (Print) | 9789815129328 |
| State | Published - Aug 9 2024 |
| Externally published | Yes |
Helium-ion microscopy and its applications in nanoscale devices
Shinichi Ogawa, Gregor Hlawacek, Fayong Liu, Shu Nakaharai, Nirjhar Sarkar, Shane Cybartie
Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review