Growth, structure, and properties of uniformly a-axis oriented ferroelectric Bi3.25La0.75Ti3O12 thin films on Si(100) substrates

D. Hesse, H. N. Lee, N. D. Zakharov, U. Gösele

Research output: Contribution to journalConference articlepeer-review

Abstract

Uniformly a-axis-oriented, epitaxially twinned Bi3.25La0.75Ti3O12 (BLT) thin films having the major spontaneous polarization entirely along the film normal were grown by pulsed laser deposition on yttria-stabilized zirconia-buffered Si(100) substrates covered with very thin SrRuO3 bottom electrodes. Using SrRuO3 bottom electrodes of a specific low thickness in combination with a relatively high growth rate and a high oxygen pressure, the volume fraction of the BLT (100) orientation, which is competing with the BLT (118) orientation, was increased up to 99%. In this way the growth of fully a-axis-oriented BLT epitaxial films was achieved, attaining a remanent polarization of 32 μC/cm2. Initial fatigue experiments indicated hardly any fatigue after 109 switching cycles.

Original languageEnglish
Pages (from-to)287-296
Number of pages10
JournalMaterials Research Society Symposium - Proceedings
Volume748
StatePublished - 2003
EventFerroelectric Thin Films XI - Boston, MA, United States
Duration: Dec 2 2002Dec 5 2002

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