Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

J. B.O. Caughman; L. R. Baylor; M. A. Guillorn; V. I. Merkulov; D. H. Lowndes; L. F. Allard

doi:10.1063/1.1597981

Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

J. B.O. Caughman, L. R. Baylor, M. A. Guillorn, V. I. Merkulov, D. H. Lowndes, L. F. Allard

Research output: Contribution to journal › Article › peer-review

53 Scopus citations

Abstract

Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition was investigated. An inductively coupled plasma source that operated at a much lower neutral pressure of ∼50 mTorr was used. It was found that the ratio of etching species in the plasma to depositing species was critical to the final shape of the carbon structures that were formed.

Original language	English
Pages (from-to)	1207-1209
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	6
DOIs	https://doi.org/10.1063/1.1597981
State	Published - Aug 11 2003

Access to Document

10.1063/1.1597981

Cite this

@article{ab0030a828e044a6a2e40e8da2f455c3,

title = "Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition",

abstract = "Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition was investigated. An inductively coupled plasma source that operated at a much lower neutral pressure of ∼50 mTorr was used. It was found that the ratio of etching species in the plasma to depositing species was critical to the final shape of the carbon structures that were formed.",

author = "Caughman, {J. B.O.} and Baylor, {L. R.} and Guillorn, {M. A.} and Merkulov, {V. I.} and Lowndes, {D. H.} and Allard, {L. F.}",

year = "2003",

month = aug,

day = "11",

doi = "10.1063/1.1597981",

language = "English",

volume = "83",

pages = "1207--1209",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "6",

}

TY - JOUR

T1 - Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

AU - Caughman, J. B.O.

AU - Baylor, L. R.

AU - Guillorn, M. A.

AU - Merkulov, V. I.

AU - Lowndes, D. H.

AU - Allard, L. F.

PY - 2003/8/11

Y1 - 2003/8/11

N2 - Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition was investigated. An inductively coupled plasma source that operated at a much lower neutral pressure of ∼50 mTorr was used. It was found that the ratio of etching species in the plasma to depositing species was critical to the final shape of the carbon structures that were formed.

AB - Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition was investigated. An inductively coupled plasma source that operated at a much lower neutral pressure of ∼50 mTorr was used. It was found that the ratio of etching species in the plasma to depositing species was critical to the final shape of the carbon structures that were formed.

UR - http://www.scopus.com/inward/record.url?scp=0042425897&partnerID=8YFLogxK

U2 - 10.1063/1.1597981

DO - 10.1063/1.1597981

M3 - Article

AN - SCOPUS:0042425897

SN - 0003-6951

VL - 83

SP - 1207

EP - 1209

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 6

ER -

Growth of vertically aligned carbon nanofibers by low-pressure inductively coupled plasma-enhanced chemical vapor deposition

Abstract

Access to Document

Other files and links

Fingerprint

Cite this