Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices

The growth of continuous diamond layer on single crystal lithium niobate using microwave chemical vapor deposition was demonstrated. The temperature of the substrate during deposition was maintained near 700°C so as to reduce the loss of lithium from lithium niobate and to reduce the thermal stresses. It was found using x-ray diffraction and Raman spectroscopy that the lithium niobate lattice is preserved without the incorporation of carbon. The integrated lithium niobate-diamond layered structure was shown to be suitable for surface acoustic wave devices.