Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices

K. Jagannadham; M. J. Lance; T. R. Watkins

doi:10.1116/1.1740770

Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices

K. Jagannadham, M. J. Lance, T. R. Watkins

Research output: Contribution to journal › Article › peer-review

9 Scopus citations

Abstract

The growth of continuous diamond layer on single crystal lithium niobate using microwave chemical vapor deposition was demonstrated. The temperature of the substrate during deposition was maintained near 700°C so as to reduce the loss of lithium from lithium niobate and to reduce the thermal stresses. It was found using x-ray diffraction and Raman spectroscopy that the lithium niobate lattice is preserved without the incorporation of carbon. The integrated lithium niobate-diamond layered structure was shown to be suitable for surface acoustic wave devices.

Original language	English
Pages (from-to)	1105-1109
Number of pages	5
Journal	Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films
Volume	22
Issue number	4
DOIs	https://doi.org/10.1116/1.1740770
State	Published - Jul 2004
Externally published	Yes

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abstract = "The growth of continuous diamond layer on single crystal lithium niobate using microwave chemical vapor deposition was demonstrated. The temperature of the substrate during deposition was maintained near 700°C so as to reduce the loss of lithium from lithium niobate and to reduce the thermal stresses. It was found using x-ray diffraction and Raman spectroscopy that the lithium niobate lattice is preserved without the incorporation of carbon. The integrated lithium niobate-diamond layered structure was shown to be suitable for surface acoustic wave devices.",

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AB - The growth of continuous diamond layer on single crystal lithium niobate using microwave chemical vapor deposition was demonstrated. The temperature of the substrate during deposition was maintained near 700°C so as to reduce the loss of lithium from lithium niobate and to reduce the thermal stresses. It was found using x-ray diffraction and Raman spectroscopy that the lithium niobate lattice is preserved without the incorporation of carbon. The integrated lithium niobate-diamond layered structure was shown to be suitable for surface acoustic wave devices.

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Growth of diamond film on single crystal lithium niobate for surface acoustic wave devices

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