Growth mechanism, film morphology, texture and stresses for three types of HFCVD diamond film growth

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@article{d3f18817eaef465982f5f740dcd80dc6,

title = "Growth mechanism, film morphology, texture and stresses for three types of HFCVD diamond film growth",

author = "Clausing, \{R. E.\} and L. Heatherly and Specht, \{E. D.\} and More, \{K. L.\} and Begun, \{G. M.\}",

year = "1990",

doi = "10.1016/0008-6223(90)90277-6",

language = "English",

volume = "28",

pages = "762--763",

journal = "Carbon",

issn = "0008-6223",

publisher = "Elsevier",

number = "6",

}

TY - JOUR

T1 - Growth mechanism, film morphology, texture and stresses for three types of HFCVD diamond film growth

AU - Clausing, R. E.

AU - Heatherly, L.

AU - Specht, E. D.

AU - More, K. L.

AU - Begun, G. M.

PY - 1990

Y1 - 1990

UR - https://www.scopus.com/pages/publications/0025632227

U2 - 10.1016/0008-6223(90)90277-6

DO - 10.1016/0008-6223(90)90277-6

M3 - Article

AN - SCOPUS:0025632227

SN - 0008-6223

VL - 28

SP - 762

EP - 763

JO - Carbon

JF - Carbon

IS - 6

ER -