Growth mechanism, film morphology, texture and stresses for three types of HFCVD diamond film growth

R. E. Clausing, L. Heatherly, E. D. Specht, K. L. More, G. M. Begun

Research output: Contribution to journalArticlepeer-review

2 Scopus citations
Original languageEnglish
Pages (from-to)762-763
Number of pages2
JournalCarbon
Volume28
Issue number6
DOIs
StatePublished - 1990

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