Abstract
Nanomechanical measurements of platinum-carbon 3D nanoscale architectures grown via focused electron beam induced deposition (FEBID) were performed using a nanoindentation system in a scanning electron microscope (SEM) for simultaneous in situ imaging. Compression tests were used to estimate the modulus of the platinum-carbon deposits to be in the range of 8.6-10.5 GPa. Cantilever arm bend tests resulted in a modulus estimation of 15.6 GPa. Atomic layer deposition was used to conformally coat FEBID structures with a thin film of Al2O3, which strengthened the structures and increased the measured modulus. Cycled load-displacement testing at various load rates of nano-truss structures was also performed, demonstrating a viscoelastic response in the FEBID material. Finally, load-displacement tests of a variety of 3-dimensional nanoarchitectures with and without Al2O3 coatings were measured.
| Original language | English |
|---|---|
| Pages (from-to) | 16349-16356 |
| Number of pages | 8 |
| Journal | Nanoscale |
| Volume | 9 |
| Issue number | 42 |
| DOIs | |
| State | Published - Nov 14 2017 |
Funding
The authors would like to thank Dr Kurt Johanns and Zachary Denson from Nanomechanics, Inc. for their invaluable assistance with the NanoFlip™ system as well as Dr Warren Oliver for helpful conversations. BBL acknowledges support via the University of Tennessee Chancellor’s fellowship program. BAM acknowledges support from the National Science Foundation Graduate Research Fellowship Program under grant number DGE-1452154. GMP’s contributions to this work were supported in part by the National Science Foundation under grant number DMR-1427812. BS, JDF, and PDR acknowledge that their contribution was supported by and the project was performed at Oak Ridge National Laboratory’s Center for Nanophase Materials Sciences, which is a U.S. Department of Energy (DOE) Office of Science User Facility.