Growth and characterization of non-c-axis-oriented SrBi2Ta 2O9 epitaxial thin films on Si(100) substrates with SrRuO3 bottom electrodes

Ho Nyung Lee; Dmitri Zakharov; Stephan Senz; Alain Pignolet; Dietrich Hesse

doi:10.1080/10584580108011929

Growth and characterization of non-c-axis-oriented SrBi₂Ta ₂O₉ epitaxial thin films on Si(100) substrates with SrRuO₃ bottom electrodes

Ho Nyung Lee, Dmitri Zakharov, Stephan Senz, Alain Pignolet, Dietrich Hesse

Research output: Contribution to journal › Conference article › peer-review

5 Scopus citations

Abstract

We have successfully grown non-c-axis-oriented epitaxial ferroelectric SrBi2Ta2O9 (SBT) films with (116) and (103) orientations on Si(100) substrates using epitaxial (110)- and (111)-oriented SrRuO3 (SRO) bottom electrodes, respectively. The SRO orientations have been induced by coating the Si(100) substrates with epitaxial YSZ(100) and MgO(111)/ YSZ(100) buffer layers, respectively. All films were sequentially grown by pulsed laser deposition. Specific in-plane orientations of the epitaxial SBT films were found, which are in turn determined by specific in-plane orientations of the epitaxial SRO bottom electrodes. These include a diagonal rectangle-on-cube epitaxy of SRO(110) on YSZ(100) and a triangle-on-triangle epitaxy of SRO(111) on MgO(111).

Original language	English
Pages (from-to)	73-80
Number of pages	8
Journal	Integrated Ferroelectrics
Volume	39
Issue number	1-4
DOIs	https://doi.org/10.1080/10584580108011929
State	Published - 2001
Externally published	Yes
Event	13th International Symposium on Integrated Ferroelectrics - Colorado Springs, CO, United States Duration: Mar 11 2006 → Mar 14 2006

Keywords

Epitaxial thin films
Ferroelectric heterostructure
Pulsed laser deposition
SrBiTaO
SrRuO

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10.1080/10584580108011929

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title = "Growth and characterization of non-c-axis-oriented SrBi2Ta 2O9 epitaxial thin films on Si(100) substrates with SrRuO3 bottom electrodes",

abstract = "We have successfully grown non-c-axis-oriented epitaxial ferroelectric SrBi2Ta2O9 (SBT) films with (116) and (103) orientations on Si(100) substrates using epitaxial (110)- and (111)-oriented SrRuO3 (SRO) bottom electrodes, respectively. The SRO orientations have been induced by coating the Si(100) substrates with epitaxial YSZ(100) and MgO(111)/ YSZ(100) buffer layers, respectively. All films were sequentially grown by pulsed laser deposition. Specific in-plane orientations of the epitaxial SBT films were found, which are in turn determined by specific in-plane orientations of the epitaxial SRO bottom electrodes. These include a diagonal rectangle-on-cube epitaxy of SRO(110) on YSZ(100) and a triangle-on-triangle epitaxy of SRO(111) on MgO(111).",

keywords = "Epitaxial thin films, Ferroelectric heterostructure, Pulsed laser deposition, SrBiTaO, SrRuO",

author = "Lee, {Ho Nyung} and Dmitri Zakharov and Stephan Senz and Alain Pignolet and Dietrich Hesse",

year = "2001",

doi = "10.1080/10584580108011929",

language = "English",

volume = "39",

pages = "73--80",

journal = "Integrated Ferroelectrics",

issn = "1058-4587",

publisher = "Taylor and Francis Group",

number = "1-4",

note = "13th International Symposium on Integrated Ferroelectrics ; Conference date: 11-03-2006 Through 14-03-2006",

}

TY - JOUR

T1 - Growth and characterization of non-c-axis-oriented SrBi2Ta 2O9 epitaxial thin films on Si(100) substrates with SrRuO3 bottom electrodes

AU - Lee, Ho Nyung

AU - Zakharov, Dmitri

AU - Senz, Stephan

AU - Pignolet, Alain

AU - Hesse, Dietrich

PY - 2001

Y1 - 2001

N2 - We have successfully grown non-c-axis-oriented epitaxial ferroelectric SrBi2Ta2O9 (SBT) films with (116) and (103) orientations on Si(100) substrates using epitaxial (110)- and (111)-oriented SrRuO3 (SRO) bottom electrodes, respectively. The SRO orientations have been induced by coating the Si(100) substrates with epitaxial YSZ(100) and MgO(111)/ YSZ(100) buffer layers, respectively. All films were sequentially grown by pulsed laser deposition. Specific in-plane orientations of the epitaxial SBT films were found, which are in turn determined by specific in-plane orientations of the epitaxial SRO bottom electrodes. These include a diagonal rectangle-on-cube epitaxy of SRO(110) on YSZ(100) and a triangle-on-triangle epitaxy of SRO(111) on MgO(111).

AB - We have successfully grown non-c-axis-oriented epitaxial ferroelectric SrBi2Ta2O9 (SBT) films with (116) and (103) orientations on Si(100) substrates using epitaxial (110)- and (111)-oriented SrRuO3 (SRO) bottom electrodes, respectively. The SRO orientations have been induced by coating the Si(100) substrates with epitaxial YSZ(100) and MgO(111)/ YSZ(100) buffer layers, respectively. All films were sequentially grown by pulsed laser deposition. Specific in-plane orientations of the epitaxial SBT films were found, which are in turn determined by specific in-plane orientations of the epitaxial SRO bottom electrodes. These include a diagonal rectangle-on-cube epitaxy of SRO(110) on YSZ(100) and a triangle-on-triangle epitaxy of SRO(111) on MgO(111).

KW - Epitaxial thin films

KW - Ferroelectric heterostructure

KW - Pulsed laser deposition

KW - SrBiTaO

KW - SrRuO

UR - http://www.scopus.com/inward/record.url?scp=0038748976&partnerID=8YFLogxK

U2 - 10.1080/10584580108011929

DO - 10.1080/10584580108011929

M3 - Conference article

AN - SCOPUS:0038748976

SN - 1058-4587

VL - 39

SP - 73

EP - 80

JO - Integrated Ferroelectrics

JF - Integrated Ferroelectrics

IS - 1-4

T2 - 13th International Symposium on Integrated Ferroelectrics

Y2 - 11 March 2006 through 14 March 2006

ER -

Growth and characterization of non-c-axis-oriented SrBi₂Ta ₂O₉ epitaxial thin films on Si(100) substrates with SrRuO₃ bottom electrodes

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Keywords

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