Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Susanne Stemmer; Youli Li; Brendan Foran; Patrick S. Lysaght; Stephen K. Streiffer; Paul Fuoss; Soenke Seifert

doi:10.1063/1.1617369

Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Susanne Stemmer
, Youli Li
, Brendan Foran
, Patrick S. Lysaght
, Stephen K. Streiffer
, Paul Fuoss
, Soenke Seifert

Research output: Contribution to journal › Article › peer-review

101 Scopus citations

Abstract

Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N₂ gas after deposition.

Original language	English
Pages (from-to)	3141-3143
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	15
DOIs	https://doi.org/10.1063/1.1617369
State	Published - Oct 13 2003
Externally published	Yes

Access to Document

10.1063/1.1617369

Cite this

@article{7331bac9e66c4d26a3a4cf6a57673ab4,

title = "Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films",

abstract = "Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N2 gas after deposition.",

author = "Susanne Stemmer and Youli Li and Brendan Foran and Lysaght, \{Patrick S.\} and Streiffer, \{Stephen K.\} and Paul Fuoss and Soenke Seifert",

year = "2003",

month = oct,

day = "13",

doi = "10.1063/1.1617369",

language = "English",

volume = "83",

pages = "3141--3143",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "15",

}

TY - JOUR

T1 - Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

AU - Stemmer, Susanne

AU - Li, Youli

AU - Foran, Brendan

AU - Lysaght, Patrick S.

AU - Streiffer, Stephen K.

AU - Fuoss, Paul

AU - Seifert, Soenke

PY - 2003/10/13

Y1 - 2003/10/13

N2 - Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N2 gas after deposition.

AB - Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N2 gas after deposition.

UR - https://www.scopus.com/pages/publications/0242335951

U2 - 10.1063/1.1617369

DO - 10.1063/1.1617369

M3 - Article

AN - SCOPUS:0242335951

SN - 0003-6951

VL - 83

SP - 3141

EP - 3143

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 15

ER -

Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Abstract

Access to Document

Other files and links

Fingerprint

Cite this