Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Susanne Stemmer; Youli Li; Brendan Foran; Patrick S. Lysaght; Stephen K. Streiffer; Paul Fuoss; Soenke Seifert

doi:10.1063/1.1617369

Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Susanne Stemmer, Youli Li, Brendan Foran, Patrick S. Lysaght, Stephen K. Streiffer, Paul Fuoss, Soenke Seifert

Research output: Contribution to journal › Article › peer-review

100 Scopus citations

Abstract

Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N₂ gas after deposition.

Original language	English
Pages (from-to)	3141-3143
Number of pages	3
Journal	Applied Physics Letters
Volume	83
Issue number	15
DOIs	https://doi.org/10.1063/1.1617369
State	Published - Oct 13 2003
Externally published	Yes

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10.1063/1.1617369

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abstract = "Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N2 gas after deposition.",

author = "Susanne Stemmer and Youli Li and Brendan Foran and Lysaght, {Patrick S.} and Streiffer, {Stephen K.} and Paul Fuoss and Soenke Seifert",

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AU - Stemmer, Susanne

AU - Li, Youli

AU - Foran, Brendan

AU - Lysaght, Patrick S.

AU - Streiffer, Stephen K.

AU - Fuoss, Paul

AU - Seifert, Soenke

PY - 2003/10/13

Y1 - 2003/10/13

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AB - Phase separation in hafnium silicate films was investigated using grazing-incidence small-angle x-ray scattering (GISAXS) and high resolution transmission electron microscopy (HRTEM). The wavelengths of the composition fluctuations were found significant in comparison with current gate lengths. Films were rapidly thermal annealed (RTA) at temperatures between 700 and 1000°C in N2 gas after deposition.

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Grazing-incidence small angle x-ray scattering studies of phase separation in hafnium silicate films

Abstract

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