Graphene etching by a Near-Field Scanning Microwave Microscope

Tamara Monti, Andrea Di Donato, Davide Mencarelli, Giuseppe Venanzoni, Antonio Morini, Ivan V. Vlassiouk, Alexander Tselev, Marco Farina

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

Significant efforts are being invested in investigation of graphene, as well as its nanopatterning and shaping, owing to its promising properties. Here we present a study of hexagonal graphene flakes, deposited on a copper foil by chemical vapor deposition. In particular we have exploited a Near-Field Scanning Microwave Microscope, and investigated the impact of the microwave power on the sample. From preliminary data, we found the possibility of inducing a localized destruction of the graphene by means of the near-field microwave probe. We exploited this effect to create a recognizable pattern on a flake. A discussion of the roles of concurrent physical phenomena is also presented.

Original languageEnglish
Title of host publication2013 IEEE MTT-S International Microwave Symposium Digest, MTT 2013
DOIs
StatePublished - 2013
Event2013 IEEE MTT-S International Microwave Symposium Digest, MTT 2013 - Seattle, WA, United States
Duration: Jun 2 2013Jun 7 2013

Publication series

NameIEEE MTT-S International Microwave Symposium Digest
ISSN (Print)0149-645X

Conference

Conference2013 IEEE MTT-S International Microwave Symposium Digest, MTT 2013
Country/TerritoryUnited States
CitySeattle, WA
Period06/2/1306/7/13

Keywords

  • Etching
  • Microwave imaging
  • Nanolithography
  • Nanoscale devices
  • Nanostructured materials
  • Scanning probe microscopy

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