Generalized ellipsometry in unusual configurations

G. E. Jellison; D. E. Holcomb; J. D. Hunn; C. M. Rouleau; G. W. Wright

doi:10.1016/j.apsusc.2006.05.120

Generalized ellipsometry in unusual configurations

G. E. Jellison, D. E. Holcomb, J. D. Hunn, C. M. Rouleau, G. W. Wright

Research output: Contribution to journal › Article › peer-review

5 Scopus citations

Abstract

Most ellipsometry experiments are performed by shining polarized light onto a sample at a large angle of incidence, and the results are interpreted in terms of thin film thicknesses and isotropic optical functions of the film or substrate. However, it is possible to alter the geometrical arrangement, either by observing the sample in transmission or at normal-incidence reflection. In both cases, the experiment is fundamentally the same, but the interpretation of the results is considerably different. Both configurations can be used in conjunction with microscope optics, allowing for images to be made of the sample. The results of three examples of these different configurations using the two-modulator generalized ellipsometer (2-MGE) are reported: (1) spectroscopic birefringence measurements of ZnO, (2) electric field-induced birefringence (Pockels effect) in GaAs, and (3) normal-incidence reflection anisotropy of highly oriented pyrolytic graphite (HOPG).

Original language	English
Pages (from-to)	47-51
Number of pages	5
Journal	Applied Surface Science
Volume	253
Issue number	1 SPEC. ISS.
DOIs	https://doi.org/10.1016/j.apsusc.2006.05.120
State	Published - Oct 31 2006

Funding

Research was sponsored in part by the Office of Nuclear Energy, Science and Technology, the Office of Basic Energy Sciences, the National Nuclear Security Administration and Oak Ridge National Laboratory, managed by UT-Battelle, LLC, for the U.S. Department of Energy under contract No. DE-ACO5-00OR22725.

Funders	Funder number
Office of Nuclear Energy, Science and Technology
U.S. Department of Energy	DE-ACO5-00OR22725
Basic Energy Sciences
National Nuclear Security Administration
Oak Ridge National Laboratory

Keywords

Birefringence
Ellipsometry
Optical anisotropy
Pockels effect

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10.1016/j.apsusc.2006.05.120

Cite this

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title = "Generalized ellipsometry in unusual configurations",

abstract = "Most ellipsometry experiments are performed by shining polarized light onto a sample at a large angle of incidence, and the results are interpreted in terms of thin film thicknesses and isotropic optical functions of the film or substrate. However, it is possible to alter the geometrical arrangement, either by observing the sample in transmission or at normal-incidence reflection. In both cases, the experiment is fundamentally the same, but the interpretation of the results is considerably different. Both configurations can be used in conjunction with microscope optics, allowing for images to be made of the sample. The results of three examples of these different configurations using the two-modulator generalized ellipsometer (2-MGE) are reported: (1) spectroscopic birefringence measurements of ZnO, (2) electric field-induced birefringence (Pockels effect) in GaAs, and (3) normal-incidence reflection anisotropy of highly oriented pyrolytic graphite (HOPG).",

keywords = "Birefringence, Ellipsometry, Optical anisotropy, Pockels effect",

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AU - Jellison, G. E.

AU - Holcomb, D. E.

AU - Hunn, J. D.

AU - Rouleau, C. M.

AU - Wright, G. W.

PY - 2006/10/31

Y1 - 2006/10/31

N2 - Most ellipsometry experiments are performed by shining polarized light onto a sample at a large angle of incidence, and the results are interpreted in terms of thin film thicknesses and isotropic optical functions of the film or substrate. However, it is possible to alter the geometrical arrangement, either by observing the sample in transmission or at normal-incidence reflection. In both cases, the experiment is fundamentally the same, but the interpretation of the results is considerably different. Both configurations can be used in conjunction with microscope optics, allowing for images to be made of the sample. The results of three examples of these different configurations using the two-modulator generalized ellipsometer (2-MGE) are reported: (1) spectroscopic birefringence measurements of ZnO, (2) electric field-induced birefringence (Pockels effect) in GaAs, and (3) normal-incidence reflection anisotropy of highly oriented pyrolytic graphite (HOPG).

AB - Most ellipsometry experiments are performed by shining polarized light onto a sample at a large angle of incidence, and the results are interpreted in terms of thin film thicknesses and isotropic optical functions of the film or substrate. However, it is possible to alter the geometrical arrangement, either by observing the sample in transmission or at normal-incidence reflection. In both cases, the experiment is fundamentally the same, but the interpretation of the results is considerably different. Both configurations can be used in conjunction with microscope optics, allowing for images to be made of the sample. The results of three examples of these different configurations using the two-modulator generalized ellipsometer (2-MGE) are reported: (1) spectroscopic birefringence measurements of ZnO, (2) electric field-induced birefringence (Pockels effect) in GaAs, and (3) normal-incidence reflection anisotropy of highly oriented pyrolytic graphite (HOPG).

KW - Birefringence

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Generalized ellipsometry in unusual configurations

Abstract

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Keywords

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