Formation of metallic nanoclusters in silica by ion implantation

D. Ila; E. K. Williams; S. Sarkisov; C. C. Smith; D. B. Poker; D. K. Hensley

doi:10.1016/S0168-583X(98)00072-X

Formation of metallic nanoclusters in silica by ion implantation

D. Ila, E. K. Williams, S. Sarkisov, C. C. Smith, D. B. Poker, D. K. Hensley

Nanofabrication Research Laboratory

Research output: Contribution to journal › Article › peer-review

84 Scopus citations

Abstract

We have changed both linear and nonlinear optical properties of suprasil-1 by implanting 2.0 MeV copper, 350 keV tin, 1.5 MeV silver and 3.0 MeV gold. These changes were induced both by over implantation above the threshold fluence for spontaneous cluster formation and by subsequent thermal annealing, and are due to an increase in resonance optical absorption as well as an enhancement of the nonlinear optical properties. Using optical absorption spectrophotometry and Rutherford Backscattering Spectrometry, we have measured the cluster size for each heat treatment temperature. Using Z-scan technique we have determined the third order electric susceptibility for each implanted species to be 1.5 × 10^-6 esu for Sn nanoclusters, 2.7 × 10^-6 esu for Cu nanoclusters, 5 × 10^-7 esu for Ag nanoclusters, to 6.5 × 10^-7 esu for Au nanoclusters in suprasil-1.

Original language	English
Pages (from-to)	289-293
Number of pages	5
Journal	Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
Volume	141
Issue number	1-4
DOIs	https://doi.org/10.1016/S0168-583X(98)00072-X
State	Published - May 1998

Keywords

Ion implantation
Metal colloids
Nanocrystals
Nanoparticles

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10.1016/S0168-583X(98)00072-X

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title = "Formation of metallic nanoclusters in silica by ion implantation",

abstract = "We have changed both linear and nonlinear optical properties of suprasil-1 by implanting 2.0 MeV copper, 350 keV tin, 1.5 MeV silver and 3.0 MeV gold. These changes were induced both by over implantation above the threshold fluence for spontaneous cluster formation and by subsequent thermal annealing, and are due to an increase in resonance optical absorption as well as an enhancement of the nonlinear optical properties. Using optical absorption spectrophotometry and Rutherford Backscattering Spectrometry, we have measured the cluster size for each heat treatment temperature. Using Z-scan technique we have determined the third order electric susceptibility for each implanted species to be 1.5 × 10-6 esu for Sn nanoclusters, 2.7 × 10-6 esu for Cu nanoclusters, 5 × 10-7 esu for Ag nanoclusters, to 6.5 × 10-7 esu for Au nanoclusters in suprasil-1.",

keywords = "Ion implantation, Metal colloids, Nanocrystals, Nanoparticles",

author = "D. Ila and Williams, {E. K.} and S. Sarkisov and Smith, {C. C.} and Poker, {D. B.} and Hensley, {D. K.}",

year = "1998",

month = may,

doi = "10.1016/S0168-583X(98)00072-X",

language = "English",

volume = "141",

pages = "289--293",

journal = "Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms",

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TY - JOUR

T1 - Formation of metallic nanoclusters in silica by ion implantation

AU - Ila, D.

AU - Williams, E. K.

AU - Sarkisov, S.

AU - Smith, C. C.

AU - Poker, D. B.

AU - Hensley, D. K.

PY - 1998/5

Y1 - 1998/5

N2 - We have changed both linear and nonlinear optical properties of suprasil-1 by implanting 2.0 MeV copper, 350 keV tin, 1.5 MeV silver and 3.0 MeV gold. These changes were induced both by over implantation above the threshold fluence for spontaneous cluster formation and by subsequent thermal annealing, and are due to an increase in resonance optical absorption as well as an enhancement of the nonlinear optical properties. Using optical absorption spectrophotometry and Rutherford Backscattering Spectrometry, we have measured the cluster size for each heat treatment temperature. Using Z-scan technique we have determined the third order electric susceptibility for each implanted species to be 1.5 × 10-6 esu for Sn nanoclusters, 2.7 × 10-6 esu for Cu nanoclusters, 5 × 10-7 esu for Ag nanoclusters, to 6.5 × 10-7 esu for Au nanoclusters in suprasil-1.

AB - We have changed both linear and nonlinear optical properties of suprasil-1 by implanting 2.0 MeV copper, 350 keV tin, 1.5 MeV silver and 3.0 MeV gold. These changes were induced both by over implantation above the threshold fluence for spontaneous cluster formation and by subsequent thermal annealing, and are due to an increase in resonance optical absorption as well as an enhancement of the nonlinear optical properties. Using optical absorption spectrophotometry and Rutherford Backscattering Spectrometry, we have measured the cluster size for each heat treatment temperature. Using Z-scan technique we have determined the third order electric susceptibility for each implanted species to be 1.5 × 10-6 esu for Sn nanoclusters, 2.7 × 10-6 esu for Cu nanoclusters, 5 × 10-7 esu for Ag nanoclusters, to 6.5 × 10-7 esu for Au nanoclusters in suprasil-1.

KW - Ion implantation

KW - Metal colloids

KW - Nanocrystals

KW - Nanoparticles

UR - http://www.scopus.com/inward/record.url?scp=0032065025&partnerID=8YFLogxK

U2 - 10.1016/S0168-583X(98)00072-X

DO - 10.1016/S0168-583X(98)00072-X

M3 - Article

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SN - 0168-583X

VL - 141

SP - 289

EP - 293

JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

IS - 1-4

ER -

Formation of metallic nanoclusters in silica by ion implantation

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