Fluid-Guided CVD Growth for Large-Scale Monolayer Two-Dimensional Materials

Dong Zhou, Dong Zhou, Ji Lang, Ji Lang, Nicholas Yoo, Nicholas Yoo, Raymond R. Unocic, Qianhong Wu, Qianhong Wu, Bo Li, Bo Li

Research output: Contribution to journalArticlepeer-review

20 Scopus citations

Abstract

Atmospheric pressure chemical vapor deposition (APCVD) has been used extensively for synthesizing two-dimensional (2D) materials because of its low cost and promise for high-quality monolayer crystal synthesis. However, the understanding of the reaction mechanism and the key parameters affecting the APCVD processes is still in its embryonic stage. Hence, the scalability of the APCVD method in achieving large-scale continuous film remains very poor. Here, we use MoSe2 as a model system and present a fluid guided growth strategy for understanding and controlling the growth of 2D materials. Through the integration of experiment and computational fluid dynamics (CFD) analysis in the full-reactor scale, we identified three key parameters, precursor mixing, fluid velocity, and shear stress, which play a critical role in the APCVD process. By modifying the geometry of the growth setup to enhance precursor mixing and decrease nearby velocity shear rate and adjusting flow direction, we have successfully obtained inch-scale monolayer MoSe2. This unprecedented success of achieving scalable 2D materials through fluidic design lays the foundation for designing new CVD systems to achieve the scalable synthesis of nanomaterials.

Original languageEnglish
Pages (from-to)26342-26349
Number of pages8
JournalACS Applied Materials and Interfaces
Volume12
Issue number23
DOIs
StatePublished - Jun 10 2020

Funding

D.Z. and B.L. were supported by the Villanova startup fund. Q.W. and J.L. were partially supported by the National Science Foundation CBET Fluid Dynamics Program under Award 1511096. D.Z., N.Y., and B.L. were partially supported by the U.S. Department of Energy, Office of Science, Office of Workforce Development for Teachers and Scientists (WDTS) under the Visiting Faculty Program (VFP). A portion of this research (STEM, and Raman) was conducted at the Center for Nanophase Materials Sciences, which is a DOE Office of Science User Facility.

Keywords

  • atmospheric pressure chemical deposition
  • computational fluid dynamics
  • fluid guided
  • fluid velocity
  • precursor mixing
  • shear stress
  • two-dimensional materials

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