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Ferroelectric and piezoelectric properties of MOCVD Pb(Mg1/3Nb2/3)O3-PbTiO3 epitaxial thin films

  • P. K. Baumann
  • , G. R. Bai
  • , S. K. Streiffer
  • , O. Auciello
  • , K. Ghosh
  • , S. Stemmer
  • , A. Munkholm
  • , Carol Thompson
  • , D. J. Kim
  • , J. P. Maria
  • , A. I. Kingon

Research output: Contribution to journalConference articlepeer-review

3 Scopus citations

Abstract

We have grown epitaxial Pb(Mg1/3Nb2/3)O3 (PMN) and (1-x)(Pb(Mg1/3Nb2/3)O3)-x(PbTiO3) (PMN-PT) thin films by metalorganic chemical vapor deposition at 700 - 780°C on (100) SrTiO3 and SrRuO3/SrTiO3 substrates. The zero-bias permittivity and loss measured at room temperature and 10 kHz for 220 nm thick pure PMN films were 900 and 1.5%, respectively. For PMN-PT films, the small-signal permittivity ranged from 1000 to 1500 depending on deposition conditions and Ti content; correspondingly low values for the zero-bias dielectric loss between 1 and 5% were determined for all specimens. For PMN-PT with x of approximately 0.30-0.35, polarization hysteresis with Pr≈18μC/cm2 was obtained. Initial piezoresponse data are discussed.

Original languageEnglish
Pages (from-to)517-522
Number of pages6
JournalMaterials Research Society Symposium - Proceedings
Volume596
StatePublished - 2000
Externally publishedYes
EventFerroelectric Thin Films VIII - Boston, MA, USA
Duration: Nov 29 1999Dec 2 1999

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