Abstract
We have grown epitaxial Pb(Mg1/3Nb2/3)O3 (PMN) and (1-x)(Pb(Mg1/3Nb2/3)O3)-x(PbTiO3) (PMN-PT) thin films by metalorganic chemical vapor deposition at 700 - 780°C on (100) SrTiO3 and SrRuO3/SrTiO3 substrates. The zero-bias permittivity and loss measured at room temperature and 10 kHz for 220 nm thick pure PMN films were 900 and 1.5%, respectively. For PMN-PT films, the small-signal permittivity ranged from 1000 to 1500 depending on deposition conditions and Ti content; correspondingly low values for the zero-bias dielectric loss between 1 and 5% were determined for all specimens. For PMN-PT with x of approximately 0.30-0.35, polarization hysteresis with Pr≈18μC/cm2 was obtained. Initial piezoresponse data are discussed.
Original language | English |
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Pages (from-to) | 517-522 |
Number of pages | 6 |
Journal | Materials Research Society Symposium - Proceedings |
Volume | 596 |
State | Published - 2000 |
Externally published | Yes |
Event | Ferroelectric Thin Films VIII - Boston, MA, USA Duration: Nov 29 1999 → Dec 2 1999 |