Fabrication of single-crystal diamond microcomponents

John D. Hunn; S. P. Withrow; C. W. White; R. E. Clausing; L. Heatherly; C. Paul Christensen

doi:10.1063/1.112959

Fabrication of single-crystal diamond microcomponents

John D. Hunn, S. P. Withrow, C. W. White, R. E. Clausing, L. Heatherly, C. Paul Christensen

Particle Fuel Forms

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Abstract

We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers.

Original language	English
Pages (from-to)	3072-3074
Number of pages	3
Journal	Applied Physics Letters
Volume	65
Issue number	24
DOIs	https://doi.org/10.1063/1.112959
State	Published - 1994

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abstract = "We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers.",

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AU - Withrow, S. P.

AU - White, C. W.

AU - Clausing, R. E.

AU - Heatherly, L.

AU - Christensen, C. Paul

PY - 1994

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N2 - We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers.

AB - We have combined a technique for the lift-off of thin diamond films from a bulk diamond with a technique for engraving diamond with a focused excimer laser to produce free-standing single-crystal diamond microstructures. One microcomponent that has been produced is a 12 tooth gear ∼400 μm in diameter and ∼13 μm thick. Other microstructures have also been demonstrated, showing the versatility of this method. This process should be applicable to producing diamond microcomponents down to spatial dimensions (width and thickness) of a few micrometers.

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Fabrication of single-crystal diamond microcomponents

Abstract

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