Fabrication of nanopipes using vertically aligned carbon nanofiber templates and their properties

A. V. Melechko, T. E. McKnight, M. A. Guillorn, B. Ilic, V. I. Merkulov, M. J. Doktycz, B. Warmac, D. McCorkle, D. H. Lowndes, M. L. Simpson

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

2 Scopus citations

Abstract

A method to fabricate nanoscale structures suitable for fluidic transport is reported. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays.

Original languageEnglish
Title of host publication2003 Nanotechnology Conference and Trade Show - Nanotech 2003
EditorsM. Laudon, B. Romanowicz
Pages416-419
Number of pages4
StatePublished - 2003
Event2003 Nanotechnology Conference and Trade Show - Nanotech 2003 - San Francisco, CA, United States
Duration: Feb 23 2003Feb 27 2003

Publication series

Name2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Volume3

Conference

Conference2003 Nanotechnology Conference and Trade Show - Nanotech 2003
Country/TerritoryUnited States
CitySan Francisco, CA
Period02/23/0302/27/03

Keywords

  • Carbon nanofibers
  • Microfabrication
  • Nanofluidics
  • Porous membrane

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