@inproceedings{bc992b88a0d249d28c2b1678b0f6d6d6,
title = "Fabrication of nanopipes using vertically aligned carbon nanofiber templates and their properties",
abstract = "A method to fabricate nanoscale structures suitable for fluidic transport is reported. Vertically aligned carbon nanofibers grown by plasma-enhanced chemical vapor deposition are used as sacrificial templates for nanopipes with internal diameters as small as 30 nm and lengths up to several micrometers that are oriented perpendicular to the substrate. This method provides a high level of control over the nanopipe location, number, length, and diameter, permitting them to be deterministically positioned on a substrate and arranged into arrays.",
keywords = "Carbon nanofibers, Microfabrication, Nanofluidics, Porous membrane",
author = "Melechko, {A. V.} and McKnight, {T. E.} and Guillorn, {M. A.} and B. Ilic and Merkulov, {V. I.} and Doktycz, {M. J.} and B. Warmac and D. McCorkle and Lowndes, {D. H.} and Simpson, {M. L.}",
year = "2003",
language = "English",
isbn = "0972842209",
series = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
pages = "416--419",
editor = "M. Laudon and B. Romanowicz",
booktitle = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003",
note = "2003 Nanotechnology Conference and Trade Show - Nanotech 2003 ; Conference date: 23-02-2003 Through 27-02-2003",
}