Fabrication of low cost surface acoustic wave sensors using direct printing by aerosol inkjet

Marissa E. Morales-Rodriguez; Pooran C. Joshi; James R. Humphries; Peter L. Fuhr; Timothy J. McIntyre

doi:10.1109/ACCESS.2018.2824118

Fabrication of low cost surface acoustic wave sensors using direct printing by aerosol inkjet

Marissa E. Morales-Rodriguez, Pooran C. Joshi, James R. Humphries, Peter L. Fuhr, Timothy J. McIntyre

Grid Communications and Security

Research output: Contribution to journal › Article › peer-review

35 Scopus citations

Abstract

Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO₃ substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. The linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.

Original language	English
Pages (from-to)	20907-20915
Number of pages	9
Journal	IEEE Access
Volume	6
DOIs	https://doi.org/10.1109/ACCESS.2018.2824118
State	Published - Apr 6 2018

Funding

This work was supported by the U.S. Department of Energy, UT-Battelle, LLC, through the Laboratory Director’s Research and Development Program of the Oak Ridge National Laboratory, under Contract DE-AC05-00OR22725.

Keywords

Additive manufacturing
aerosol inkjet
printed electronics
sensors
surface acoustic wave (SAW)

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10.1109/ACCESS.2018.2824118

Cite this

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abstract = "Advancements in additive manufacturing techniques, printed electronics, and nanomaterials have made it possible for the cost-effective fabrication of sensors and systems. Low-cost sensors for continuous and real time monitoring of physical and chemical parameters will directly impact the energy-efficiency, safety, and manufacturing challenges of diverse technology sectors. In this paper, we present the design, printing, and characterization of a two-port surface acoustic wave (SAW) integrated on LiNbO3 substrate. The aerosol jet printer was used for direct-writing of interdigitated transducers for SAW devices with center frequency in the range of 40-87 MHz. The linear response of a temperature sensor based on the SAW design shows promise for direct-writing of environmental sensors on low-temperature substrates.",

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Fabrication of low cost surface acoustic wave sensors using direct printing by aerosol inkjet

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