Fabrication of high frequency MEMS devices

Dragoslav Grbovic, Panos Datskos, Nickolay Lavrik, Slobodan Rajic

Research output: Contribution to journal › Conference article › peer-review

Original language	English
Pages (from-to)	671-687
Number of pages	17
Journal	Proceedings of the International Instrumentation Symposium
Volume	457
State	Published - 2005
Externally published	Yes
Event	Proceedings of the 51st International Instrumentation Symposium - Knoxville, TN, United States Duration: May 8 2005 → May 12 2005

Cite this

@article{739463ae519f4b1f8d3a2b4d5e033480,

title = "Fabrication of high frequency MEMS devices",

author = "Dragoslav Grbovic and Panos Datskos and Nickolay Lavrik and Slobodan Rajic",

year = "2005",

language = "English",

volume = "457",

pages = "671--687",

journal = "Proceedings of the International Instrumentation Symposium",

issn = "1558-8041",

note = "Proceedings of the 51st International Instrumentation Symposium ; Conference date: 08-05-2005 Through 12-05-2005",

}

TY - JOUR

T1 - Fabrication of high frequency MEMS devices

AU - Grbovic, Dragoslav

AU - Datskos, Panos

AU - Lavrik, Nickolay

AU - Rajic, Slobodan

PY - 2005

Y1 - 2005

UR - http://www.scopus.com/inward/record.url?scp=33645288338&partnerID=8YFLogxK

M3 - Conference article

AN - SCOPUS:33645288338

SN - 1558-8041

VL - 457

SP - 671

EP - 687

JO - Proceedings of the International Instrumentation Symposium

JF - Proceedings of the International Instrumentation Symposium

T2 - Proceedings of the 51st International Instrumentation Symposium

Y2 - 8 May 2005 through 12 May 2005

ER -