Abstract
Gate cathode structures were fabricated using a single grown VACNF as a FE element. The growth process provided compelling evidence that VACNFs can enable the development of practical micro- and nanoscale FE arrays with wide-ranging applications.
Original language | English |
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Pages (from-to) | 573-578 |
Number of pages | 6 |
Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
Volume | 19 |
Issue number | 2 |
DOIs | |
State | Published - Mar 2001 |