Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids

B. J. Rodriguez; S. Jesse; K. Seal; A. P. Baddorf; S. V. Kalinin; P. D. Rack

doi:10.1063/1.2778762

Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids

B. J. Rodriguez, S. Jesse, K. Seal, A. P. Baddorf, S. V. Kalinin, P. D. Rack

Research output: Contribution to journal › Article › peer-review

25 Scopus citations

Abstract

Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. Electromechanical imaging of ferroelectric domains, current voltage probing of a gold surface, and a probe apex repair process are demonstrated.

Original language	English
Article number	093130
Journal	Applied Physics Letters
Volume	91
Issue number	9
DOIs	https://doi.org/10.1063/1.2778762
State	Published - 2007

Funding

A portion of this research was conducted at the Center for Nanophase Materials Sciences, which is sponsored at Oak Ridge National Laboratory by the Division of Scientific User Facilities, U.S. Department of Energy. P.D.R. gratefully acknowledges support for the Joint Directed Research Development program at UT. One of the authors (S.J.) acknowledges support of the Division of Materials Sciences and Engineering through the Office of Basic Energy Sciences, U.S. Department of Energy at ORNL managed and operated by UT-Battelle, LLC.

Funders	Funder number
U.S. Department of Energy
Basic Energy Sciences
Oak Ridge National Laboratory
Division of Materials Sciences and Engineering

Access to Document

10.1063/1.2778762

Cite this

@article{e2bb3d16199147f09cd9fa17f33f127e,

title = "Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids",

abstract = "Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. Electromechanical imaging of ferroelectric domains, current voltage probing of a gold surface, and a probe apex repair process are demonstrated.",

author = "Rodriguez, {B. J.} and S. Jesse and K. Seal and Baddorf, {A. P.} and Kalinin, {S. V.} and Rack, {P. D.}",

year = "2007",

doi = "10.1063/1.2778762",

language = "English",

volume = "91",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "9",

}

TY - JOUR

T1 - Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids

AU - Rodriguez, B. J.

AU - Jesse, S.

AU - Seal, K.

AU - Baddorf, A. P.

AU - Kalinin, S. V.

AU - Rack, P. D.

PY - 2007

Y1 - 2007

N2 - Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. Electromechanical imaging of ferroelectric domains, current voltage probing of a gold surface, and a probe apex repair process are demonstrated.

AB - Insulated cantilever probes with a high aspect ratio conducting apex have been fabricated and their dynamic and electrical properties analyzed. The cantilevers were coated with silicon dioxide and a via was fabricated through the oxide at the tip apex and backfilled with tungsten to create an insulated probe with a conducting tip. The stiffness and Q factor of the cantilevers increased after the modifications and their resonances shifted to higher frequencies. The coupling strength between the cantilever and the coating are determined. Electromechanical imaging of ferroelectric domains, current voltage probing of a gold surface, and a probe apex repair process are demonstrated.

UR - http://www.scopus.com/inward/record.url?scp=34548412617&partnerID=8YFLogxK

U2 - 10.1063/1.2778762

DO - 10.1063/1.2778762

M3 - Article

AN - SCOPUS:34548412617

SN - 0003-6951

VL - 91

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 9

M1 - 093130

ER -

Fabrication, dynamics, and electrical properties of insulated scanning probe microscopy probes for electrical and electromechanical imaging in liquids

Abstract

Funding

Access to Document

Other files and links

Fingerprint

Cite this