TY - GEN
T1 - Fabrication and crystallization of AAO template for sensor applications
AU - Jo, Seo Hyeon
AU - Lee, Sung Gap
AU - Kim, Dae Young
PY - 2012
Y1 - 2012
N2 - In this study, AAO templates were fabricated by two steps anodizing processes and then crystallized. For the crystallization, TG/DTA analysis was performed and determined crystallizing condition. The structural properties were observed for the using host material of nanometer scale device like humidity sensor or gas sensor etc. by Scanning electron microscope (SEM), X-ray diffraction patterns and transmission electron microscope (TEM). The crystallized AAO layer showed the typical XRD pattern of polycrystalline structure with the γ-(Al2O3)1.333 phase. And through the selected area electron diffraction (SAED) patterns showed that the AAO was crystallized.
AB - In this study, AAO templates were fabricated by two steps anodizing processes and then crystallized. For the crystallization, TG/DTA analysis was performed and determined crystallizing condition. The structural properties were observed for the using host material of nanometer scale device like humidity sensor or gas sensor etc. by Scanning electron microscope (SEM), X-ray diffraction patterns and transmission electron microscope (TEM). The crystallized AAO layer showed the typical XRD pattern of polycrystalline structure with the γ-(Al2O3)1.333 phase. And through the selected area electron diffraction (SAED) patterns showed that the AAO was crystallized.
UR - https://www.scopus.com/pages/publications/84869159345
U2 - 10.1109/NANO.2012.6321933
DO - 10.1109/NANO.2012.6321933
M3 - Conference contribution
AN - SCOPUS:84869159345
SN - 9781467321983
T3 - Proceedings of the IEEE Conference on Nanotechnology
BT - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
T2 - 2012 12th IEEE International Conference on Nanotechnology, NANO 2012
Y2 - 20 August 2012 through 23 August 2012
ER -