Exploring spatial resolution in electron back-scattered diffraction experiments via Monte Carlo simulation

S. X. Ren, E. A. Kenik, K. B. Alexander, A. Goyal

Research output: Contribution to journalArticlepeer-review

42 Scopus citations

Abstract

A Monte Carlo model was used to simulate specimen-electron beam interactions relevant to electron back-scattered diffraction (EBSD). Electron trajectories were calculated for a variety of likely experimental conditions to examine the interaction volume of the incident electrons as well as that of the subset of incident electrons that emerge from the specimen, i.e., back-scattered electrons (BSEs). The spatial resolution of EBSD was investigated as functions of both materials properties, such as atomic number, atomic weight, and density, and experimental parameters, such as specimen thickness, tilt, and incident beam accelerating voltage. These simulations reveal that the achievable spatial resolution in EBSD is determined by these intrinsic and extrinsic parameters.

Original languageEnglish
Pages (from-to)15-22
Number of pages8
JournalMicroscopy and Microanalysis
Volume4
Issue number1
DOIs
StatePublished - 1998

Keywords

  • Back-scattered electrons (BSEs)
  • Bond enthalpies
  • Electron back-scattered diffraction (EBSD)
  • Energy distribution
  • Gas-phase equilibria
  • High-pressure mass spectrometer
  • Monte Carlo simulation
  • Spatial resolution

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